Additional Resources

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IEEE Transactions on Components, Hybrids, and Manufacturing Technology, Vol. 13, No. 3, September 1990. “In-Line Statistical Process Control and Feedback for VLSI Integrated Circuit Manufacturing”

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Semiconductor International, Vol. 14, No. 6, May 1991. “Wafer Tracking Comes of Age”
Click here to view this article.

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IEEE Transactions on Semiconductor Manufacturing, Vol. 15, No. 4, November 2002. “Quantifying the Value of Ownership of Yield Analysis Technologies”